Clean Room
Nanofabrication Lab
The Swiss Nanoscience Institute Nanofabrication lab (SNI Nanofab) offers the equipment, environment and experience needed for the fabrication and prototyping of State of the Art micro- and nano-devices used in fundamental and applied condensed matter physics. The high-end lithography, deposition, etching, post-processing systems and the clean room (CR) space allow the Nanofab users to routinely pattern and manipulate micro- (<100 um) and nano- (<100 nm) scale metal, semiconductor and polymeric materials resulting in the outstanding nanomaterials and devices at the core of the experimental physics projects of the University of Basel and the SNI.
The Nanofab currently features:
- 500 m2 of lab surface (30 m2 of CR class ISO7)
- 70+ users
- 40+ fabrication and characterization tools
- A CR Technician and a CR Manager